Nanoscale multiply charged focused ion beam platform for surface modification, implantation, and analysis

by Been, T., Birou, T., Bourin, C., Cassimi, A., Delobbe, A., Guillous, S., Houel, A., Keizer, A., Lalande, M., Mellier, J.-B, Ramillon, J.-M, Salou, P., Sineau, A.
Published 2022