Atomic layer Atomic layer etching 1 Atoms 1 Epitaxial lift-off techniques 1 Etching 1 Graphene 1 Graphene layers 1 Higher yield 1 Layer by layer 1 Lift offs 1 Semiconductor devices 1 Single crystalline substrates 1 Single crystals 1 Single-crystalline 1 Strontium titanates 1 Substrates 1 Titanium compounds 1 Ultra-thin 1 Ultrathin films 1