Electrochemically deposited gallium oxide nanostructures on silicon substrates

We report a synthesis of beta-Ga2O3 nanostructures on Si substrate by electrochemical deposition using a mixture of Ga2O3, HCl, NH4OH, and H2O. The presence of Ga3+ ions contributed to the deposition of Ga2O3 nanostructures on the Si surface with the assistance of applied potentials. The morphologie...

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Bibliographic Details
Main Authors: Ghazali, NM (Author), Hashim, AM (Author), Mahmood, MR (Author), Yasui, K (Author)
Format: Article
Language:English
Online Access:View Fulltext in Publisher