A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor

A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor

For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated th...

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Bibliographic Details
Main Authors: Zhao, Chun (Author), Wood, Graham (Author), Pu, Suan (Author), Kraft, Michael (Author)
Format: Article
Language:English
Published: 2015-09-11.
Subjects:
Article
Online Access:Get fulltext
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100 1 0 |a Zhao, Chun  |e author 
700 1 0 |a Wood, Graham  |e author 
700 1 0 |a Pu, Suan  |e author 
700 1 0 |a Kraft, Michael  |e author 
245 0 0 |a A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor 
260 |c 2015-09-11. 
856 |z Get fulltext  |u https://eprints.soton.ac.uk/381539/1/1-s2.0-S1877705815024297-main.pdf 
520 |a For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated that, without any external drive signals, the proposed self-oscillating loop is able to automatically lock to the desired mode frequency for the sensing applications. The amplitude ratios from the simulation showed good agreement with the theoretical values 
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655 7 |a Article 

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