Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs
High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuat...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2009.
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| Subjects: | |
| Online Access: | Get fulltext |