The structural and electrical properties of thermally grown TiO2 thin films

The structural and electrical properties of thermally grown TiO2 thin films

We studied the structural and electrical properties of TiO2 thin films grown by thermal oxidation of e-beam evaporated Ti layers on Si substrates. Time of flight secondary ion mass spectroscopy (TOF-SIMS) was used to analyse the interfacial and chemical composition of the TiO2 thin films. Metal oxid...

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Bibliographic Details
Main Authors: Chong, LH (Author), Mallik, K (Author), de Groot, CH (Author), Kersting, R (Author)
Format: Article
Language:English
Published: 2006-02.
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