Impact of ex-situ and in-situ cleans on the performance of bipolar transistors with low thermal budget in-situ phosphorus doped polysilicon emitter contacts
This paper investigates the effects of an in-situ hydrogen bake and an ex-situ HF etch prior to polysilicon deposition on the electrical characteristics of bipolar transistors fabricated with low thermal budget in-situ phosphorus doped polysilicon emitter contacts. Emitter contact deposition in an U...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2001-11.
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| Subjects: | |
| Online Access: | Get fulltext |