Growth of crystalline garnet mixed films, superlattices and multilayers for optical applications via shuttered Combinatorial Pulsed Laser Deposition

A range of high-quality crystalline garnet multilayer structures have been fabricated via multi-beam, multi-target PLD in conjunction with a system of mechanical shutters. Structures grown consisted of alternating Gd<sub>3</sub>Ga<sub>5</sub>O<sub>12</sub> (GGG) a...

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Bibliographic Details
Main Authors: Sloyan, Katherine A. (Author), May-Smith, Timothy C. (Author), Zervas, Michalis N. (Author), Eason, Robert W. (Author), Huband, Steven (Author), Walker, David (Author), Thomas, Pamela A. (Author)
Format: Article
Language:English
Published: 2010-11-22.
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Summary:A range of high-quality crystalline garnet multilayer structures have been fabricated via multi-beam, multi-target PLD in conjunction with a system of mechanical shutters. Structures grown consisted of alternating Gd<sub>3</sub>Ga<sub>5</sub>O<sub>12</sub> (GGG) and Gd<sub>3</sub>Sc<sub>2</sub>Ga<sub>3</sub>O<sub>12</sub> (GSGG) layers on Y<sub>3</sub>Al<sub>5</sub>O<sub>12</sub> (YAG) substrates, with both simple and chirped designs. Distinct layers are observed where layer thickness is around 2 nm or greater, although some layering may also be present at a sub-unit cell level. These structures demonstrate the viability of the shutter technique as a quick, simple fabrication method for a variety of optical multilayer structures.