Low Power Phase Change Memory using Silicon Carbide as a Heater Layer
The amorphous to crystalline transition of germanium-antimony-tellurium (GST) using two types heating element was investigated. With separate heater structure, simulation was done using COMSOL Multiphysic 5.0. Silicon carbide (SiC) and Titanium Sitride (TiSi3) has been selected as a heater and diffe...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Physics Publishing
2015
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| Subjects: | |
| Online Access: | View Fulltext in Publisher View in Scopus |