Effect of substrates on Zinc Oxide thin films fabrication using sol-gel method

• Main Authors: Aziz, A.A (Author), Kadir, R.A (Author), Mohd Taib, N. (Author), Wan Ahmad, W.R (Author), Zoolfakar, A.S (Author)
• Format: Article
• Language: English
• Published: Institute of Physics Publishing 2018
• Subjects: Characterization of the films; Different substrates; Dipcoating methods; Electronic equipment; Fabrication; II-VI semiconductors; ITO glass; Metallic films; On-wafer; Optical films; Optical properties; P-type silicon; Silicon wafers; Sol-gel process; Sol-gels; Substrates; Thermoelectric equipment; Thin films; UV-Vis NIR; Zinc oxide; Zinc oxide thin films; ZnO thin film
• Online Access: View Fulltext in Publisher; View in Scopus
• ISBN: 17578981 (ISSN)
• DOI: 10.1088/1757-899X/340/1/012002

The properties of ZnO thin films were deposited on three different substrates via dip coating method was investigated. The films were prepared on glass, ITO and p-type silicon. Characterization of the film revealed that the properties of the dip coated ZnO thin films were influenced by the type of substrates. The grains on ITO and glass were ∼10 nm in size while the grains on wafer agglomerate together to form a denser film. Studies of the optical properties using UV-VIS-NIR of the fabricated films demonstrated that glass has the highest transmittance compared to ITO. © Published under licence by IOP Publishing Ltd.