Influence of rectangular substrate chamfer on edge bead effect of a spin-coated thin film
Spin coating is a common method for fabricating thin films. The edge bead effect is a major contributor to thin film non-uniformities. This study investigates the influence of chamfer angles and widths of a rectangular substrate on the edge bead formation mechanism in spin-coated films. Through the...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Institute of Physics Inc.
2023
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |