Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers

Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers

This work presents a micromachining process that allows the creation of hierarchical, matryoshka-like MEMS structures that can be used for multi-axis sensing. This novel vibration multi-axis MEMS sensor based on the capacitive open-loop operation can be widely deployed in the structural monitoring s...

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Bibliographic Details
Main Authors: Alves, F.S (Author), Calaza, C. (Author), Dias, R.A (Author), Fernandes, J. (Author), Garcia, I.S (Author), Moreira, J. (Author), Queiroz, J.B (Author)
Format: Article
Language:English
Published: Elsevier B.V. 2023
Subjects:
3-axis sensing
Accelerometers
Bulk micromachining
Bulk- micromachining
Capacitance
Capacitance measurement
Capacitive sensors
Degrees of freedom (mechanics)
Electrodes
MEMS accelerometer
Metallic membranes
Micro-fabrication
Micromachining process
Multi-axes
Multi-Axis
Multi-Axis-
Proof mass
Silicon wafers
SOI-based process
Surface micromachining
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