Joule heat effects on reliability of RF MEMS switches
"Microelectromechanical systems (MEMS) technology has been evolving for about two decades and, now it is integrated in many designs, including radio frequency (RF) switches characterized by µm dimensions. Today, designers are attempting o develop the ideal RF MEMS switch, yet electro-thermo-m...
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Digital WPI
2003
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| Online Access: | https://digitalcommons.wpi.edu/etd-theses/1056 https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=2055&context=etd-theses |