Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor
This Thesis relates to the continually advancing field of microelectromechanical systems (MEMS). With MEMS technology, there are many different areas of concentration available for research. This Thesis addresses analysis and preliminary characterization of a cantilever-type MEMS chemical sensor f...
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Digital WPI
2004
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| Online Access: | https://digitalcommons.wpi.edu/etd-theses/806 https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1805&context=etd-theses |