Investigation of Measurement Artifacts Introduced By Horizontal Scanning Surface Profiling Instruments

Horizontal scanning instruments, such as, atomic force microscopes and scanning laser microscopes, acquire three-dimensional topographic maps of surfaces, at scales ranging from tenths of nanometers to hundreds of millimeters, by measuring elevations along a series of traces scanning a region of the...

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Bibliographic Details
Main Author: Bergstrom, Torbjorn S
Other Authors: Christopher A. Brown, Advisor
Format: Others
Published: Digital WPI 2002
Subjects:
Online Access:https://digitalcommons.wpi.edu/etd-theses/29
https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1028&context=etd-theses