Development of a modular interferometric microscopy system for characterization of MEMS
One of the key measurement devices used in characterization of microelectromechanical systems (MEMS) is the interferometric microscope. This device allows remote, noninvasive measurements of the surface shape and deformations of MEMS in full-field-of-view with high spatial resolution and nanometer a...
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Digital WPI
2007
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| Online Access: | https://digitalcommons.wpi.edu/etd-theses/6 https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=1005&context=etd-theses |