Low-temperature Fabrication Process for Integrated High-Aspect Ratio Metal Oxide Nanostructure Semiconductor Gas Sensors
This work presents a new low-temperature fabrication process of metal oxide nanostructures that allows high-aspect ratio zinc oxide (ZnO) and titanium dioxide (TiO2) nanowires and nanotubes to be readily integrated with microelectronic devices for sensor applications. This process relies on a new me...
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| Format: | Others |
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VCU Scholars Compass
2017
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| Online Access: | http://scholarscompass.vcu.edu/etd/4781 http://scholarscompass.vcu.edu/cgi/viewcontent.cgi?article=5859&context=etd |