Study on dimensional measurements based on rotating wire probe and acoustic emission touch sensing

There is an increasing trend towards miniaturization of micro features as well as micro parts. In order to accurately produce these components and the miniaturized features on them, accurate measurement of the component dimensions is required. However, there are limitations in the dimensional measur...

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Bibliographic Details
Main Author: Elfurjani, Salah
Other Authors: Jun, Martin Byung-Guk
Language:English
en
Published: 2016
Subjects:
Online Access:http://hdl.handle.net/1828/7458