Microfabrication of Plasmonic Biosensors in CYTOP Integrating a Thin SiO2 Diffusion and Etch-barrier Layer

Microfabrication of Plasmonic Biosensors in CYTOP Integrating a Thin SiO2 Diffusion and Etch-barrier Layer

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A novel process for the fabrication of Long Range Surface Plasmon Polariton (LRSPP) waveguide based biosensors is presented herein. The structure of the biosensor is comprised of Au stripe waveguide devices embedded in thick CYTOP claddings with a SiO2 solvent diffusion barrier and etch-stop layer....

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Bibliographic Details
Main Author: Hanif, Raza
Other Authors: Berini, Pierre
Language:en
Published: Université d'Ottawa / University of Ottawa 2011
Subjects:
Plasmonics
Long Range Surface Plasmon Polariton
Microfabrication
Silicon Dioxide (SiO2)
O2 plasma RIE etch
e-beam evaporation
Micro-fluidic channels
Optical cut-back measurements
CYTOP
Online Access:http://hdl.handle.net/10393/19880
http://dx.doi.org/10.20381/ruor-4507

Internet

http://hdl.handle.net/10393/19880
http://dx.doi.org/10.20381/ruor-4507

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