Ion Beam Synthesis of Carbon Assisted Nanosystems in Silicon Based Substrates
The systematic study of the formation of β-SiC formed by low energy carbon ion (C-)implantation into Si followed by high temperature annealing is presented. The research is performed to explore the optimal annealing conditions. The formation of crystalline β-SiC is clearly observed...
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| Format: | Others |
| Language: | English |
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University of North Texas
2011
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| Online Access: | https://digital.library.unt.edu/ark:/67531/metadc68033/ |