Reduced-order modelling, circuit-level design and SOI fabrication of microelectromechanical resonators
This thesis deals with two important research aspects concerning radio frequency (RF) microresonators and switches. First, a new approach for compact modeling and simulation of these devices is presented. Then, a combined process flow for their simultaneous fabrication on a SOI substrate is propose...
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| Format: | Doctoral Thesis |
| Language: | en |
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Alma Mater Studiorum - Università di Bologna
2007
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| Online Access: | http://amsdottorato.unibo.it/461/ |