Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects

Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects

Bibliographic Details
Main Author: Canino, Mariaconcetta <1980>
Other Authors: Cavallini, Anna
Format: Doctoral Thesis
Language:en
Published: Alma Mater Studiorum - Università di Bologna 2007
Subjects:
FIS/03 Fisica della materia
Online Access:http://amsdottorato.unibo.it/329/
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spelling ndltd-unibo.it-oai-amsdottorato.cib.unibo.it-3292016-06-11T04:58:48Z Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects Canino, Mariaconcetta <1980> FIS/03 Fisica della materia Alma Mater Studiorum - Università di Bologna Cavallini, Anna 2007-05-17 Doctoral Thesis PeerReviewed application/pdf en http://amsdottorato.unibo.it/329/ info:eu-repo/semantics/openAccess
collection NDLTD
language en
format Doctoral Thesis
sources NDLTD
topic FIS/03 Fisica della materia
spellingShingle FIS/03 Fisica della materia
Canino, Mariaconcetta <1980>
Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects
author2 Cavallini, Anna
author_facet Cavallini, Anna
Canino, Mariaconcetta <1980>
author Canino, Mariaconcetta <1980>
author_sort Canino, Mariaconcetta <1980>
title Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects
title_short Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects
title_full Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects
title_fullStr Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects
title_full_unstemmed Phosphorus ion implantation in SiC: influence of the annealing conditions on dopant activation and defects
title_sort phosphorus ion implantation in sic: influence of the annealing conditions on dopant activation and defects
publisher Alma Mater Studiorum - Università di Bologna
publishDate 2007
url http://amsdottorato.unibo.it/329/
work_keys_str_mv AT caninomariaconcetta1980 phosphorusionimplantationinsicinfluenceoftheannealingconditionsondopantactivationanddefects
_version_ 1718301701096603648

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