Characterization and modification of the mechanical and surface properties at the nanoscale

In the past two decades much effort has been put in the characterization of the mechanical<p>and surface properties at the nano-scale in order to conceive reliable N/MEMS<p>(Nano and Micro ElectroMechanical Systems) applications. Techniques like nanoindentation,<p>nanoscratching, a...

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Bibliographic Details
Main Author: Tam, Enrico
Other Authors: Delplancke, Marie-Paule
Format: Doctoral Thesis
Language:fr
Published: Universite Libre de Bruxelles 2009
Subjects:
Online Access:http://hdl.handle.net/2013/ULB-DIPOT:oai:dipot.ulb.ac.be:2013/210226