Characterization and modification of the mechanical and surface properties at the nanoscale
In the past two decades much effort has been put in the characterization of the mechanical<p>and surface properties at the nano-scale in order to conceive reliable N/MEMS<p>(Nano and Micro ElectroMechanical Systems) applications. Techniques like nanoindentation,<p>nanoscratching, a...
Main Author: | Tam, Enrico |
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Other Authors: | Delplancke, Marie-Paule |
Format: | Doctoral Thesis |
Language: | fr |
Published: |
Universite Libre de Bruxelles
2009
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Subjects: | |
Online Access: | http://hdl.handle.net/2013/ULB-DIPOT:oai:dipot.ulb.ac.be:2013/210226 |
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