Laser-assisted chemical liquid-phase deposition of metals for micro- and optoelectronics
Abstract The demands toward the development of simple and cost-effective fabrication methods of metallic structures with high lateral resolution on different substrates - applied in many fields of technology, such as in microelectronics, optoelectronics, micromechanics as well as in sensor and actu...
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| Format: | Doctoral Thesis |
| Language: | English |
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University of Oulu
2002
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| Online Access: | http://urn.fi/urn:isbn:9514266862 http://nbn-resolving.de/urn:isbn:9514266862 |