Tryskové plazmatické systémy - experiment a model
In the present work we study the ow of working gas through a plasmajet system. In this work we describe the basic principle of hollow cathode discharge and its use for technological applications, mainly for thin layers coating. One of the important parameters during the deposition is the speed of th...
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Format: | Dissertation |
Language: | Slovak |
Published: |
2010
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Online Access: | http://www.nusl.cz/ntk/nusl-286233 |