An experimental approach for studying the creep behavior of thin film/ substrate interfaces

Approved for public release; distribution is unlimited === Large shear stresses often develop at the interface between dissimilar materials in microelectronic devices, when they are subjected to thermo-mechanical excursions. These stresses can facilitate diffusionally accommodated interfacial slidin...

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Bibliographic Details
Main Author: Parks, Carl L.
Other Authors: Dutta, Indranath
Format: Others
Published: Monterey, California. Naval Postgraduate School 2012
Subjects:
Online Access:http://hdl.handle.net/10945/1368

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