Substrate curvature measurement system
Industry often requires, in a variety of processes, the measurement of deformation induced in a solid object by mechanical stress. One such process is during the manufacture of very large scale integrated circuits (VLSI). During this process a substrate is coated with a thin film to protect the micr...
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| Format: | Dissertation |
| Language: | English |
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University of Cape Town
2016
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| Online Access: | http://hdl.handle.net/11427/19376 |