High-Performance Simulations for Atmospheric Pressure Plasma Reactor
Plasma-assisted processing and deposition of materials is an important component of modern industrial applications, with plasma reactors sharing 30% to 40% of manufacturing steps in microelectronics production [1]. Development of new flexible electronics increases demands for efficient high-throughp...
Main Author: | Chugunov, Svyatoslav |
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Format: | Others |
Published: |
North Dakota State University
2017
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Subjects: | |
Online Access: | https://hdl.handle.net/10365/26626 |
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