High-Performance Simulations for Atmospheric Pressure Plasma Reactor

Plasma-assisted processing and deposition of materials is an important component of modern industrial applications, with plasma reactors sharing 30% to 40% of manufacturing steps in microelectronics production [1]. Development of new flexible electronics increases demands for efficient high-throughp...

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Bibliographic Details
Main Author: Chugunov, Svyatoslav
Format: Others
Published: North Dakota State University 2017
Subjects:
Online Access:https://hdl.handle.net/10365/26626

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