Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating

Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating

京都大学 === 0048 === 新制・課程博士 === 博士(工学) === 甲第21462号 === 工博第4537号 === 新制||工||1707(附属図書館) === 京都大学大学院工学研究科マイクロエンジニアリング専攻 === (主査)教授 田畑 修, 教授 鈴木 基史, 准教授 土屋 智由, 教授 平方 寛之 === 学位規則第4条第1項該当 === Doctor of Philosophy (Engineering) === Kyoto University === DFAM...

Full description

Bibliographic Details
Main Author: Zhang, Wenlei
Other Authors: 田畑, 修
Format: Doctoral Thesis
Language:English
Published: Kyoto University 2019
Subjects:
Tensile Test
Torsional Test
Diamond-Like Carbon
Silicon
Microstructure
500
Online Access:http://hdl.handle.net/2433/236623

Similar Items

Similar Items