Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating

Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating

京都大学 === 0048 === 新制・課程博士 === 博士(工学) === 甲第21462号 === 工博第4537号 === 新制||工||1707(附属図書館) === 京都大学大学院工学研究科マイクロエンジニアリング専攻 === (主査)教授 田畑 修, 教授 鈴木 基史, 准教授 土屋 智由, 教授 平方 寛之 === 学位規則第4条第1項該当 === Doctor of Philosophy (Engineering) === Kyoto University === DFAM...

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Bibliographic Details
Main Author: Zhang, Wenlei
Other Authors: 田畑, 修
Format: Doctoral Thesis
Language:English
Published: Kyoto University 2019
Subjects:
Tensile Test
Torsional Test
Diamond-Like Carbon
Silicon
Microstructure
500
Online Access:http://hdl.handle.net/2433/236623
id ndltd-kyoto-u.ac.jp-oai-repository.kulib.kyoto-u.ac.jp-2433-236623
record_format oai_dc
spelling ndltd-kyoto-u.ac.jp-oai-repository.kulib.kyoto-u.ac.jp-2433-2366232021-09-06T05:12:08Z Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating ダイヤモンドライクカーボン膜の全面被覆による単結晶シリコン微細構造の機械的信頼性向上 Zhang, Wenlei 田畑, 修 鈴木, 基史 土屋, 智由 平方, 寛之 張, 文磊 チャン, ウェンレイ Tensile Test Torsional Test Diamond-Like Carbon Silicon Microstructure 500 京都大学 0048 新制・課程博士 博士(工学) 甲第21462号 工博第4537号 新制||工||1707(附属図書館) 京都大学大学院工学研究科マイクロエンジニアリング専攻 (主査)教授 田畑 修, 教授 鈴木 基史, 准教授 土屋 智由, 教授 平方 寛之 学位規則第4条第1項該当 Doctor of Philosophy (Engineering) Kyoto University DFAM 2019-02-26T07:22:13Z 2019-02-26T07:22:13Z 2019-01-23 2019-01-23 doctoral thesis Thesis or Dissertation http://hdl.handle.net/2433/236623 14301甲第21462号 10.14989/doctor.k21462 14301 eng application/pdf Kyoto University 京都大学
collection NDLTD
language English
format Doctoral Thesis
sources NDLTD
topic Tensile Test
Torsional Test
Diamond-Like Carbon
Silicon
Microstructure
500
spellingShingle Tensile Test
Torsional Test
Diamond-Like Carbon
Silicon
Microstructure
500
Zhang, Wenlei
Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating
description 京都大学 === 0048 === 新制・課程博士 === 博士(工学) === 甲第21462号 === 工博第4537号 === 新制||工||1707(附属図書館) === 京都大学大学院工学研究科マイクロエンジニアリング専攻 === (主査)教授 田畑 修, 教授 鈴木 基史, 准教授 土屋 智由, 教授 平方 寛之 === 学位規則第4条第1項該当 === Doctor of Philosophy (Engineering) === Kyoto University === DFAM
author2 田畑, 修
author_facet 田畑, 修
Zhang, Wenlei
author Zhang, Wenlei
author_sort Zhang, Wenlei
title Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating
title_short Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating
title_full Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating
title_fullStr Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating
title_full_unstemmed Mechanical Reliability Enhancement of Single Crystal Silicon Microstructures by Means of Diamond-Like Carbon Film Coating
title_sort mechanical reliability enhancement of single crystal silicon microstructures by means of diamond-like carbon film coating
publisher Kyoto University
publishDate 2019
url http://hdl.handle.net/2433/236623
work_keys_str_mv AT zhangwenlei mechanicalreliabilityenhancementofsinglecrystalsiliconmicrostructuresbymeansofdiamondlikecarbonfilmcoating
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