An Investigation of the Stresses Causing the Spontaneous Delamination of Titanium-Platinum Bilayers Leading to The Formation of Nanogaps
Adhesion lithography has been used to pattern nanogaps between two electrodes of the same or different metals onto a substrate. Patterning Al and Ti/Pt bilayer electrodes have been shown to form nanogaps leaving behind relatively consistent nanogaps of less than 12 nm between the electrodes. These n...
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| Language: | en |
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2020
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| Online Access: | http://hdl.handle.net/10754/664817 |