Dynamics of MEMS Resonators and their Exploitation for Sensing and Actuation
This dissertation presents theoretical and experimental investigations into the dynamical behavior of Micro electromechanical systems (MEMS) resonators and their exploitation for filtering, sensing, and logic applications. The dissertation is divided into two parts: MEMS coupled structures and MEMS...
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| Language: | en |
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2019
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| Online Access: | http://hdl.handle.net/10754/631865 |