Robust Hierarchical Architectures for Comprehensively Compliant Semiconductors
A novel hierarchical flexing and stretching strategy for rigid semiconducting substrates was devised. Architectures for comprehensively compliant semiconductors were created as a result. Si and GaN-on-Si have been segmented into both highly flexible and rigid segments. An advanced controlled cleavag...
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| Language: | en |
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2018
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| Online Access: | http://hdl.handle.net/10754/630005 |