Higher Order Modes Excitation of Micro Cantilever Beams

Higher Order Modes Excitation of Micro Cantilever Beams

In this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a...

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Bibliographic Details
Main Author: Jaber, Nizar
Other Authors: Younis, Mohammad I.
Language:en
Published: 2014
Subjects:
MEMS
MicroContilever
Electrostatic
Resonators
Modes
Online Access:Jaber, N. (2014). Higher Order Modes Excitation of Micro Cantilever Beams. KAUST Research Repository. https://doi.org/10.25781/KAUST-4L585
http://hdl.handle.net/10754/317259

Internet

Jaber, N. (2014). Higher Order Modes Excitation of Micro Cantilever Beams. KAUST Research Repository. https://doi.org/10.25781/KAUST-4L585
http://hdl.handle.net/10754/317259

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