SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material
Polymer based microelectromechanical systems (MEMS) micromachining is finding more interest in research and applications. This is due to its low cost and less time processing compared with silicon MEMS. SU-8 is a photo-patternable polymer that is used as a structural layer for MEMS and microfluidic...
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| Language: | en |
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2012
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| Online Access: | Ramadan, K. S. (2012). SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material. KAUST Research Repository. https://doi.org/10.25781/KAUST-W12WJ http://hdl.handle.net/10754/222071 |