SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material

SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material

Polymer based microelectromechanical systems (MEMS) micromachining is finding more interest in research and applications. This is due to its low cost and less time processing compared with silicon MEMS. SU-8 is a photo-patternable polymer that is used as a structural layer for MEMS and microfluidic...

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Bibliographic Details
Main Author: Ramadan, Khaled S.
Other Authors: Foulds, Ian G.
Language:en
Published: 2012
Subjects:
SU-8 MEMS
Electrostatic Actuation
α-Si sacrificial layer
Online Access:Ramadan, K. S. (2012). SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material. KAUST Research Repository. https://doi.org/10.25781/KAUST-W12WJ
http://hdl.handle.net/10754/222071

Internet

Ramadan, K. S. (2012). SU-8 Based MEMS Process with Two Metal Layers using α-Si as a Sacrificial Material. KAUST Research Repository. https://doi.org/10.25781/KAUST-W12WJ
http://hdl.handle.net/10754/222071

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