Production and transport of low-energy ion beams for thin film deposition

• Main Authors: ヴァスケス マグダレノ, ジュニア, Magdaleno, Jr Vasquez
• Format: Others
• Language: en
• Published: 2011
• Online Access: https://doshisha.repo.nii.ac.jp/?action=repository_uri&item_id=960; http://id.nii.ac.jp/1707/00000952/; https://doshisha.repo.nii.ac.jp/?action=repository_action_common_download&item_id=960&item_no=1&attribute_id=21&file_no=1

博士(工学) === Doctor of Philosophy in Engineering === 同志社大学 === Doshisha University