Nano-sized group III oxides prepared by implantation-assisted growth techniques.
In this project, nano-sized gallium oxide and indium oxide produced by ion implantation of nitrogen/carbon and subsequent rapid thermal annealing (RTA) have been investigated. The material synthesis technique is based on using implantation of different species, which include nitrogen, carbon, oxygen...
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Format: | Others |
Language: | English Chinese |
Published: |
2008
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Online Access: | http://library.cuhk.edu.hk/record=b6074552 http://repository.lib.cuhk.edu.hk/en/item/cuhk-344185 |