study of chemical and electronic properties of silicon nitride and silicon oxynitride thin films =: 氮化硅與氮氧化硅薄膜的化學與電子性質的硏究.
by Yun-hung Ng. === Thesis (M.Phil.)--Chinese University of Hong Kong, 1999. === Includes bibliographical references. === Text in English; abstracts in English and Chinese. === by Yun-hung Ng. === Abstract --- p.ii === 論文摘要 --- p.iii === Acknowledgements --- p.iv === Table of Contents --- p.v ==...
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| Format: | Others |
| Language: | English Chinese |
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1999
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| Online Access: | http://library.cuhk.edu.hk/record=b5890149 http://repository.lib.cuhk.edu.hk/en/item/cuhk-322908 |