Excimer Laser Crystallization of Silicon Thin-Films for Monolithic 3D Integration
In 1964 the first metal oxide semiconductor (MOS) integrated circuit (IC) became available. Shortly after in 1965 Gordon Moore predicted the pace of the device density increase in ICs. His prediction became a self-fulfilling prophecy, which taking advantage of the formal device scaling rules introdu...
| Main Author: | |
|---|---|
| Language: | English |
| Published: |
2015
|
| Subjects: | |
| Online Access: | https://doi.org/10.7916/D8251HJ4 |