Development and Analysis of a Tip-based Mechanical Nano-Manufacturing Process: Nanomilling

As an alternative to well-established nano-lithographic methods, mechanical manufacturing methods which are widely applied in macro and micro-scales, have also been adapted to nano-scale. Recently, tip-based mechanical nanomanufacturing have been realized through the use of Atomic Force Microscopes...

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Bibliographic Details
Main Author: Gozen, Bulent Arda
Format: Others
Published: Research Showcase @ CMU 2012
Subjects:
Online Access:http://repository.cmu.edu/dissertations/150
http://repository.cmu.edu/cgi/viewcontent.cgi?article=1153&context=dissertations