Electrochemical micromachining of microdevices from NiTi shape memory alloys
This thesis aimed to develop a reproducible process for batch-fabricating microdevices required for MEMS and medical applications, such as micro actuators and stents, from heat-sensitive NiTi shape memory materials. Electrochemical micromachining was chosen to carry out this work. This is a non-trad...
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Cranfield University
1999
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.687720 |