The properties and performance of moisture/oxygen barrier layers deposited by remote plasma sputtering

The development of flexible lightweight OLED devices requires oxygen/moisture barrier layer thin films with water vapour transmission rates (WVTR) of < 10-6 g/m2/day. This thesis reports on single and multilayer architecture barrier layers (mostly based on SiO2, Al2O3 and TiO2) deposited onto gla...

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Bibliographic Details
Main Author: Brown, Hayley L.
Other Authors: Baker, Mark A. ; Curry, R. J. ; Thwaites, M. J. ; Hockley, P. J.
Published: University of Surrey 2015
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.683791