High resolution resonant accelerometer based on MEMS technology

Bibliographic Details
Main Author: Zou, Xudong
Published: University of Cambridge 2014
Subjects:
620
Online Access:https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.648540
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spelling ndltd-bl.uk-oai-ethos.bl.uk-6485402019-02-05T03:32:21ZHigh resolution resonant accelerometer based on MEMS technologyZou, Xudong2014620University of Cambridge10.17863/CAM.31308https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.648540https://www.repository.cam.ac.uk/handle/1810/283942Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 620
spellingShingle 620
Zou, Xudong
High resolution resonant accelerometer based on MEMS technology
author Zou, Xudong
author_facet Zou, Xudong
author_sort Zou, Xudong
title High resolution resonant accelerometer based on MEMS technology
title_short High resolution resonant accelerometer based on MEMS technology
title_full High resolution resonant accelerometer based on MEMS technology
title_fullStr High resolution resonant accelerometer based on MEMS technology
title_full_unstemmed High resolution resonant accelerometer based on MEMS technology
title_sort high resolution resonant accelerometer based on mems technology
publisher University of Cambridge
publishDate 2014
url https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.648540
work_keys_str_mv AT zouxudong highresolutionresonantaccelerometerbasedonmemstechnology
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