High resolution resonant accelerometer based on MEMS technology
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2014
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ndltd-bl.uk-oai-ethos.bl.uk-6485402019-02-05T03:32:21ZHigh resolution resonant accelerometer based on MEMS technologyZou, Xudong2014620University of Cambridge10.17863/CAM.31308https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.648540https://www.repository.cam.ac.uk/handle/1810/283942Electronic Thesis or Dissertation |
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620 |
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620 Zou, Xudong High resolution resonant accelerometer based on MEMS technology |
author |
Zou, Xudong |
author_facet |
Zou, Xudong |
author_sort |
Zou, Xudong |
title |
High resolution resonant accelerometer based on MEMS technology |
title_short |
High resolution resonant accelerometer based on MEMS technology |
title_full |
High resolution resonant accelerometer based on MEMS technology |
title_fullStr |
High resolution resonant accelerometer based on MEMS technology |
title_full_unstemmed |
High resolution resonant accelerometer based on MEMS technology |
title_sort |
high resolution resonant accelerometer based on mems technology |
publisher |
University of Cambridge |
publishDate |
2014 |
url |
https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.648540 |
work_keys_str_mv |
AT zouxudong highresolutionresonantaccelerometerbasedonmemstechnology |
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1718973608330526720 |