Contacts and ion implantation to 4H silicon carbide
Rectifying and non-rectifying contacts were fabricated in n-type 4H-Silicon Carbide. To improve the characteristics of the fabricated contacts various different surface pre-treatments were used. The impact of these pre-treatments on both contacts types was evaluated, and any improvements recorded. T...
Main Author: | Pope, G. |
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Published: |
Swansea University
2004
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Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.638549 |
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