Fundamental studies of diamond chemical vapour deposition : plasma diagnostics and computer modelling
This thesis reports experimental studies of the gas-phase chemistry within microwave plasma en- hanced (MWPE) reactors used for the chemical vapour deposition (CVD) of diamond, as well as computational investigations into gas-surface and surface based chemical reactions which are likely to play a ro...
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University of Bristol
2011
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.550307 |