Towards new hermeticity test methods for MEMS
Hermeticity is a measure of how well a package can maintain its intended ambient cavity environment over the device lifetime. Since many Micro-Electro-Mechanical Systems (MEMS) sensors, actuators and microelectronic devices require a known cavity environment for optimum operational performance, it i...
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Heriot-Watt University
2011
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.548717 |