Characterisation and material removal properties of the RAP™ process

The Reactive Atom Plasma® (RAP) process is a plasma chemical etching process. RAP was developed at RAPT Industries as a process for removing subsurface damage from silicon carbide optics. The process is being investigated at Cranfield University as a novel method for the fine surface correction of l...

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Main Author: O'Brien, William John
Other Authors: Nicholls, J. R. : Shore, Paul
Published: Cranfield University 2011
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.541264
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spelling ndltd-bl.uk-oai-ethos.bl.uk-5412642015-03-20T04:28:54ZCharacterisation and material removal properties of the RAP™ processO'Brien, William JohnNicholls, J. R. : Shore, Paul2011The Reactive Atom Plasma® (RAP) process is a plasma chemical etching process. RAP was developed at RAPT Industries as a process for removing subsurface damage from silicon carbide optics. The process is being investigated at Cranfield University as a novel method for the fine surface correction of large optics, with the aim of shortening the manufacturing period of the next generation of large telescopes. RAP offers material removal rates that are up to 10 times higher than those of ion beam figuring, the current state-of-the-art technique and the convenience in that it can be operated at atmospheric pressure. Cont/d.530.44Cranfield Universityhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.541264http://dspace.lib.cranfield.ac.uk/handle/1826/6560Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 530.44
spellingShingle 530.44
O'Brien, William John
Characterisation and material removal properties of the RAP™ process
description The Reactive Atom Plasma® (RAP) process is a plasma chemical etching process. RAP was developed at RAPT Industries as a process for removing subsurface damage from silicon carbide optics. The process is being investigated at Cranfield University as a novel method for the fine surface correction of large optics, with the aim of shortening the manufacturing period of the next generation of large telescopes. RAP offers material removal rates that are up to 10 times higher than those of ion beam figuring, the current state-of-the-art technique and the convenience in that it can be operated at atmospheric pressure. Cont/d.
author2 Nicholls, J. R. : Shore, Paul
author_facet Nicholls, J. R. : Shore, Paul
O'Brien, William John
author O'Brien, William John
author_sort O'Brien, William John
title Characterisation and material removal properties of the RAP™ process
title_short Characterisation and material removal properties of the RAP™ process
title_full Characterisation and material removal properties of the RAP™ process
title_fullStr Characterisation and material removal properties of the RAP™ process
title_full_unstemmed Characterisation and material removal properties of the RAP™ process
title_sort characterisation and material removal properties of the rap™ process
publisher Cranfield University
publishDate 2011
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.541264
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