Embedded metal mask evanescent near field optical lithography (EMM-ENFOL)

Bibliographic Details
Main Author: Sefa-Ntiri, Baah
Published: University of Birmingham 2008
Subjects:
669
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.522037
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spelling ndltd-bl.uk-oai-ethos.bl.uk-5220372015-03-20T05:01:25ZEmbedded metal mask evanescent near field optical lithography (EMM-ENFOL)Sefa-Ntiri, Baah2008669University of Birminghamhttp://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.522037Electronic Thesis or Dissertation
collection NDLTD
sources NDLTD
topic 669
spellingShingle 669
Sefa-Ntiri, Baah
Embedded metal mask evanescent near field optical lithography (EMM-ENFOL)
author Sefa-Ntiri, Baah
author_facet Sefa-Ntiri, Baah
author_sort Sefa-Ntiri, Baah
title Embedded metal mask evanescent near field optical lithography (EMM-ENFOL)
title_short Embedded metal mask evanescent near field optical lithography (EMM-ENFOL)
title_full Embedded metal mask evanescent near field optical lithography (EMM-ENFOL)
title_fullStr Embedded metal mask evanescent near field optical lithography (EMM-ENFOL)
title_full_unstemmed Embedded metal mask evanescent near field optical lithography (EMM-ENFOL)
title_sort embedded metal mask evanescent near field optical lithography (emm-enfol)
publisher University of Birmingham
publishDate 2008
url http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.522037
work_keys_str_mv AT sefantiribaah embeddedmetalmaskevanescentnearfieldopticallithographyemmenfol
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